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精密微動縮小機構設計與剛度分析
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國家自然科學基金面上項目(52475537)、西安市科技計劃項目-科學家+工程師隊伍建設項目(24KGDW0029),、陜西省教育廳服務地方專項項目(23JC050),、陜西省創(chuàng)新能力支撐計劃項目(2021TD-27)和西安市碑林區(qū)科技計劃項目(GX2434)


Precision Reduction Mechanism Design and Stiffness Analysis
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    摘要:

    精密微動縮小機構能夠提供較小空間內精密運動位移,可廣泛應用于微電子,、醫(yī)療器械和芯片封裝等精密操作領域,。本文基于柔性鉸鏈杠桿原理和無附加運動原理設計一種精密微動縮小機構,該機構能夠將輸入位移按照2∶1精密縮小,,且在運動過程中無附加力及位移,。通過等效剛度法對所設計的精密微動縮小機構進行剛度分析,計算得到該機構理論剛度為75.72 N/μm,;采用有限元法分析得到精密微動縮小機構剛度為74.06 N/μm,;采用實驗法測得到精密微動縮小機構剛度為68.86 N/μm。理論分析結果與有限元分析結果誤差為2.19%,,理論分析結果與實驗結果誤差為9.06%,,分析結果驗證了等效剛度法分析方法的有效性及精確性。研究結果對精密微動機構設計及剛度分析具有重要的理論參考價值,。

    Abstract:

    Precision micromotion reduction mechanism can provide precision motion displacement in a small space, which can be widely used in microelectronics, medical devices and chip packaging and other precision operation fields. A precision micromotion reduction mechanism was designed-based on the principle of flexible hinge lever and the principle of no additional motion, which was able to reduce the input displacement according to 2∶1 precision, and there was no additional force and displacement in the process of motion. The stiffness analysis of the designed precision micromotion reduction mechanism was carried out by the equivalent stiffness method, and the theoretical stiffness of the mechanism was calculated to be 75.72 N/μm;the stiffness of the precision micromotion reduction mechanism was analyzed by the finite element method to be 74.06 N/μm;and the stiffness of the precision micromotion reduction mechanism was measured by the experimental method to be 68.86 N/μm. The error between the theoretical analysis results and finite element analysis results was 2.19%, and the error between the theoretical analysis results and experimental results was 9.06%. The analysis results verified the validity and accuracy of the analysis method of equivalent stiffness method. The results of the study had important theoretical reference value for the design and stiffness analysis of precision micromanipulation mechanism.

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楊滿芝,王悅,張曉棟,張傳偉,韓飛燕,馮斌.精密微動縮小機構設計與剛度分析[J].農業(yè)機械學報,2025,56(3):531-538. YANG Manzhi, WANG Yue, ZHANG Xiaodong, ZHANG Chuanwei, HAN Feiyan, FENG Bin. Precision Reduction Mechanism Design and Stiffness Analysis[J]. Transactions of the Chinese Society for Agricultural Machinery,2025,56(3):531-538.

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  • 收稿日期:2025-01-02
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  • 在線發(fā)布日期: 2025-03-10
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