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A kipp oscillator gas piezoelectric micro-pump was presented. The dynamic modeling and simulation of the check valve which was the main component of pump were investigated. Based the analysis results, a proto type of gas micro-pump was fabricated and measured. The pump was driven by piezoelectric bimorph which had a hole in the middle, and a check valve was adhered to the hole to cut off fluid. The inlet and outlet was located in the two sides of the piezoelectric vibrator, and the on/off action of the check valve corresponding to the variation of the pump chamber was produced by the actuation vibration energy of piezoelectric vibrator. Compared with the traditional piezoelectric pump which inlet and outlet was located in one side and the check valve was drived by differential pressure on the two sides,，it had lower fluid resistance and preferable unidirectional cut off characteristic. So the gas pumping ability and the response frequency of check valve were enhanced. The measured output flow rate of present design by experiment reached to 720 mL/min when driving voltage and frequency was 40 V and 1 000 Hz. 