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The differential equation of motion of the Delta parallel robot flexible component was established by the finite element theory, the mechanisms dynamics model was gained by combining the kinematic characteristics and specifying the direction of the node displacement. The real motion of mechanism was regarded as the superposition of the nominal motion and elastic vibration. The position and direction error of the moving platform was regarded as the perturbation of nominal motion. The relation equation of configuration error and node displacement of moving platform was obtained. In the example, the characteristic of modal frequency of mechanism in the workspace was gained by considering the gravity, inertial force and damping dynamic response under the action. The 6-D error of the moving platform was evaluated comprehensively.