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納米磁懸浮二維工作臺(tái)力平衡結(jié)構(gòu)設(shè)
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of Force Balance for 2-DOF Nanopositioning Magnetic Levitation Stage
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    摘要:

    為了消除附加力矩對(duì)納米磁懸浮二維工作臺(tái)平穩(wěn)直線運(yùn)動(dòng)的影響,，研究了工作臺(tái)的磁力,、重力及摩擦力等各種作用力,?；诹ζ胶庠韺?duì)納米工作臺(tái)進(jìn)行了結(jié)構(gòu)設(shè)計(jì),，得到了納米電動(dòng)機(jī)驅(qū)動(dòng)力的作用方向和作用點(diǎn)坐標(biāo)。在此基礎(chǔ)上進(jìn)行了工作臺(tái)運(yùn)動(dòng)導(dǎo)軌直線度及重復(fù)性實(shí)驗(yàn),，結(jié)果表明,，工作臺(tái)的偏擺誤差在5″以下，俯仰誤差在15″以下,，兩種誤差每毫米點(diǎn)的重復(fù)性均在1″左右,，工作臺(tái)運(yùn)動(dòng)平穩(wěn)。

    Abstract:

    In order to eliminate the additional moments of force, the magnetic force, gravity force and friction force were studied in a novel two-degree-of-freedom (2-DOF) nanopositioning magnetic levitation stage. The structure of the nanopositioning stage was designed in terms of the theory of force balance, then, the direction and coordinate point of the drive force of the nanomotor were gained. The experiment of linearity and repeatability of the stage were carried out, and the experiments results indicated that the yaw error was less than 5 arcsec, the pitch error was less than 15 arcsec and the repeatability of these two errors were nearly 1 arcsec per one millimeter. The stage movement was stable.

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程伶俐,余曉芬.納米磁懸浮二維工作臺(tái)力平衡結(jié)構(gòu)設(shè)[J].農(nóng)業(yè)機(jī)械學(xué)報(bào),2009,40(9):197-200. of Force Balance for 2-DOF Nanopositioning Magnetic Levitation Stage[J]. Transactions of the Chinese Society for Agricultural Machinery,2009,40(9):197-200.

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